Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Micromachined piezoelectric ultrasonic transducer with ultra-wide frequency bandwidth

Development of piezoelectric micromachined ultrasonic transducers

Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the application of MEMS technology to ultrasound generation and detection, which is expected to offer many advantages over conventional transducers. In this work, we investigate pMUTs through novel design and fabrication methods. A finite element (FE) model, with original tools to measure device performance, was develo...

High frequency copolymer ultrasonic transducer array of size-effective elements

A layer-by-layer deposition method for producing dual-layer ultrasonic transducers from piezoelectric copolymers has been developed. The method uses a combination of customized and standard processing to obtain 2D array transducers with electrical connection of the individual elements routed directly to the rear of the substrate. A numerical model was implemented to study basic parameters effec...

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET)...